Deep-UV MicroLED for Maskless Photolithography
This is a news story, published by ScienceDaily, that relates primarily to Hong Kong University of Science and Technology news.
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UV microLED display chipsScienceDaily
•Engineering researchers develop deep-UV microLED display chips for maskless photolithography
79% Informative
Hong Kong University of Science and Technology has developed the world's first-of-its-kind deep-ultraviolet (UVC) microLED display array for lithography machines.
This enhanced efficiency UVC microLED has showcased the viability of a lowered cost maskless photolithography through the provision of adequate light output power density.
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