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Engineering researchers develop deep-UV microLED display chips for maskless photolithography

ScienceDaily
Summary
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79% Informative

Hong Kong University of Science and Technology has developed the world's first-of-its-kind deep-ultraviolet (UVC) microLED display array for lithography machines.

This enhanced efficiency UVC microLED has showcased the viability of a lowered cost maskless photolithography through the provision of adequate light output power density.

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89

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97

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20

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formal

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English

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88

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not offensive

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long-living

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